Microelectromechanical Systems III: Fabrication Fundamentals

Microelectromechanical Systems III: Fabrication Fundamentals

MEMS Fabrication, Packaging, and Industrial Practice



Sub Category

  • Engineering

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Objectives

  • Differentiate between bulk and surface micromachining strategies to select the appropriate fabrication flow for complex three-dimensional micro-structures.
  • Analyze core microfabrication processes—including photolithography, thin-film deposition, and anisotropic etching—to predict their impact on device geometry
  • Execute a multi-user MEMS process (PolyMUMPs) design flow, utilizing sacrificial layer release techniques and established design rules
  • Evaluate industrial packaging and testing constraints, addressing why housing and physical stimuli requirements often dominate the total cost and reliability


Pre Requisites

  1. B.S or graduate students, Mechanical engineering, Manufacturing Engineering, Aerospace Engineering, Electronics Engineering, Physics, Technicians with industry experience.


FAQ

  • Q. How long do I have access to the course materials?
    • A. You can view and review the lecture materials indefinitely, like an on-demand channel.
  • Q. Can I take my courses with me wherever I go?
    • A. Definitely! If you have an internet connection, courses on Udemy are available on any device at any time. If you don't have an internet connection, some instructors also let their students download course lectures. That's up to the instructor though, so make sure you get on their good side!



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