MEMS: Fundamentals, Scaling Laws, and Microscale Physics
Sub Category
- Engineering
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Objectives
- Define MEMS and identify their unique scale relative to traditional integrated circuits and macro-scale machinery.
- Evaluate the dual role of silicon as both a high-performance electrical semiconductor and a robust structural mechanical material
- Understand scaling laws to predict how surface forces, electrostatics, and thermal time constants dominate behavior at the micro-scale.
- Model mechanical primitives such as beams, plates, and anchors while accounting for the effects of silicon crystal orientation and anisotropy.
- Analyze multiphysics constraints including electrostatic pull-in instability limits and the impact of Joule heating on device stability.
Pre Requisites
- B.S or graduate students, Mechanical engineering, Manufacturing Engineering, Aerospace Engineering, Electronics Engineering, Physics, Technicians with industry experience.
FAQ
- Q. How long do I have access to the course materials?
- A. You can view and review the lecture materials indefinitely, like an on-demand channel.
- Q. Can I take my courses with me wherever I go?
- A. Definitely! If you have an internet connection, courses on Udemy are available on any device at any time. If you don't have an internet connection, some instructors also let their students download course lectures. That's up to the instructor though, so make sure you get on their good side!
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